| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating furnace for heating a plate-shaped workpiece in a specific atmosphere while moving it at accurate speed, permitting easy increase in the size and having excellent energy saving performance. SOLUTION: A delivery roll 3 for a carrying film 5 and a take-up roll 4 for the carrying film 5 are arranged on inlet side and outlet side of a furnace body 1, respectively. While the carrying film 5 is moved in the longitudinal direction of the furnace body 1, the workpiece W placed on the furnace body 1 is heated. Preferably, a gas chamber 6 for injecting gas toward the lower face of the carrying film 5 to float it is installed inside the furnace body 1. Thus, the carrying film 5 can be moved with no frictional resistance. Moreover, when exhaust type atmosphere regulators 11, 12 are installed at inlet and outlet of the furnace body 1, respectively, entry of outside air can be securely prevented. COPYRIGHT: (C)2010,JPO&INPIT |
