| 摘要 |
PROBLEM TO BE SOLVED: To provide a stripping liquid capable of removing a resist without corroding molybdenum oxide. SOLUTION: A resist stripping liquid comprising a combination of components including N-(2-hydroxyethyl)morpholine and an organic solvent can be used without corroding molybdenum oxide. Preferably, the N-(2-hydroxyethyl)morpholine and the organic solvent are included in ranges from 1 to 80 wt.% and from 20 to 99 wt.%, respectively, with respect to the whole stripping liquid. COPYRIGHT: (C)2010,JPO&INPIT |
