| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device comprising both function to produce an X-ray CT image and the function to produce a Tomosynthesis tomographic image. SOLUTION: A substrate stage 1 is disposed above a fixedly disposed X-ray source 2 and a detector stage is disposed further thereabove. The substrate stage 1 supports the substrate 10 movably along the directions of the X and Y axes. The detector stage 4 supports a FPD (Flat Panel Detector) 3 so that the FPD can move in the directions of the X and Y axes and can axially rotate. When imaging, the movement of each of the stages 1, 4 is controlled so that the position of each of the FPD 3 and an inspection region of the substrate 10 changes on a virtual circle with the optical axis of the X-ray source 2 as the center. When imaging with X-ray CT, the posture of the FPD 3 to the inspection region of the substrate 10 is controlled to change at each time of imaging. When imaging with Tomosynthesis, the FPD 3 is moved by fixing the FPD in such a state that each axis corresponds to each direction of X, Y. COPYRIGHT: (C)2010,JPO&INPIT |
