发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device includes a step-type recess pattern formed in a substrate, a gate electrode buried in the recess pattern and having a gap disposed between the gate electrode and upper sidewalls of the recess pattern, an insulation layer filling the gap, and a source and drain region formed in a portion of the substrate at two sides of the recess pattern. The semiconductor device is able to secure a required data retention time by suppressing the increase of leakage current caused by the reduction of a design rule.
申请公布号 US2010001340(A1) 申请公布日期 2010.01.07
申请号 US20090492607 申请日期 2009.06.26
申请人 LEE JIN-YUL;KIM DONG-SEOK 发明人 LEE JIN-YUL;KIM DONG-SEOK
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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