发明名称 HOT PROCESS STI IN SRAM DEVICE AND METHOD OF MANUFACTURING
摘要 <P>PROBLEM TO BE SOLVED: To provide SRAMs and logic circuits on the same integrated circuit, using combinations of a HOT (hybrid orientation technology) process and STI (shallow trench isolation region) between individual devices. Ž<P>SOLUTION: A plurality of SRAMs (1208) are formed on HOT substrates with STI, and a plurality of logic circuits are formed on the same chip, with some devices on a plurality of SOI (1202) regions and other devices on the plurality of SOI (1202) regions. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010004016(A) 申请公布日期 2010.01.07
申请号 JP20090063685 申请日期 2009.03.17
申请人 TOSHIBA CORP 发明人 SUDO TAKESHI
分类号 H01L27/10;H01L21/76;H01L21/8244;H01L27/11 主分类号 H01L27/10
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