| 摘要 |
<p>A vacuum processing device wherein a control means performs, after the completion of processing in a vacuum container by a combustible gas (Step S2), a step of closing a first valve and evacuating the container (Step S3), a step of closing a second valve after the evacuation (Step S4), and a step of opening a fifth valve and supplying an inert gas in a third container into a first supply line (Step S5), and the control means also performs, after the completion of processing in the vacuum container by the inert gas (Step S8), a step of closing a third valve and evacuating the container (Step S9), a step of closing a fourth valve after the evacuation (Step S10), and a step of opening a sixth valve and supplying an inert gas in a fourth container into a second supply line (Step S11).</p> |
