| 摘要 |
PROBLEM TO BE SOLVED: To provide a decentration measuring device which enhances measurement accuracy by suppressing influence of reflected light from surfaces other than a measuring object surface. SOLUTION: The decentration measuring device 1 is so constituted that a focus lens system 14 constituted in an illumination optical system 10 switches the position of condensation of illumination light from the paraxial center of curvature A of a measuring part 5a over to the position of a paraxial focus B, when a plurality of rays of spot light are detected by a light position sensor 30, in a state that the position of condensation of the illumination light is set at the position of the paraxial center of curvature A of the measuring part 5a; and that a condensation optical system 20 condenses, on a light condensing surface 31, rays of reflected light from the measuring part 5a irradiated with the illumination light to be condensed at the paraxial center of curvature A, or reflected light from the measuring part 5a irradiated with the illumination light to be condensed at the focus position B, according to actuation of the lens system 14. COPYRIGHT: (C)2010,JPO&INPIT |
