| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic wave detection element in which the electronic noise of a signal wiring is further reduced. SOLUTION: The electromagnetic wave detection element includes a structure in which a scanning wiring 101 (2), a signal wiring 3 and a common wiring 102 (18) are formed of metal layers different from each other and provided individually via insulation films under a sensor portion 103, and the signal wiring 3 is formed to be thicker than the scanning wiring 101 and the common wiring 102. COPYRIGHT: (C)2010,JPO&INPIT |
