| 摘要 |
PURPOSE: A capacitor and a fabricating method thereof are provided to set capacitance easily by forming the both electrode which is formed with a poly-silicon on the substrate in parallel with each other. CONSTITUTION: In a capacitor and a fabricating method thereof, a polysilicon electrodes(120) are arranged on a substrate in parallel with each other. An insulating layer is formed between polysilicon electrodes, and the insulating layer is included of the silicon oxide film(140) covering the side of the polysilicon electrode and the silicon nitride film(150) covering the side of the silicon oxide film.
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