| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonance circuit having a suppressed variation in a resonance frequency due to a dispersion in the structure dimension of a vibrator, and to provide a method of manufacturing the same. SOLUTION: The resonance circuit 30 includes: a substrate; an MEMS (Micro Electro-Mechanical System) resonator 10 provided with a fixed electrode 12 formed on the substrate and a movable electrode 13 having a movable part facing at least a part of the fixed electrode; and a voltage application means 20 for applying a bias voltage to the MEMS resonator. The voltage application means 20 is provided with a voltage-dividing circuit. The voltage-dividing circuit has as voltage dividing resistors, a compensation resistor R11 constituted of the same layer as a layer configuring the movable part and having a resistance value changed by the thickness of the layer and a reference resistor R12 connected to the compensation resonator and constituted of a structure different from the layer configuring the movable part, outputs the potential at the connection point between the compensation resistor and the reference resistor to at least one terminal 10b of the MEMS resonator, and supplies to the vibrator the bias voltage having positive correlation with the thickness of the layer by the change of the resistance value. COPYRIGHT: (C)2010,JPO&INPIT |
