OPTICAL SCANNER AND PRINTING DEVICE USING THE SAME, AND ITS CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To adjust the position of a mirror part with respect to the thickness direction of a substrate even while exciting the rotation movement by making a beam of the mirror part the axis. SOLUTION: A mirror part 130 which reflects an incident optical beam, a pair of beams 120 which support the mirror part 130 and a vibration source 110 of generating a plate wave which causes rotational vibration by using the beam 120 of the mirror part 130 as the axis are formed on the substrate 100. An edge part of the substrate 100 is fixed by a fixing member 160. In order to cancel the vibration in the thickness direction of the substrate of the mirror part 130 when the position of a node of the plate wave generated upon the driving of the vibration source 110 is deviated from the position of the beam 120, the second vibration source is disposed in the vicinity of the fixing member 160 of the substrate 100. COPYRIGHT: (C)2010,JPO&INPIT