| 摘要 |
PROBLEM TO BE SOLVED: To provide an element for a crystal oscillator in which characteristic degradation, caused by the effect of side etching, that may occur when forming an outer shape of a crystal reed through etching, can be suppressed, crystal oscillator and electronic component with the element for the crystal oscillator. SOLUTION: The element for the crystal oscillator is manufactured by implementing the steps of, when manufacturing the element for the crystal oscillator: forming an outer shape mask pattern 68 for forming an outer shape of a crystal reed 1 on an AT-cut crystal wafer W such that a connection supporting part 34 connecting the crystal reed 1 and the wafer W after etching can comes to a +X axis side; forming the outer shape of the crystal reed 1 rectangular; and forming extraction electrodes 32, 33 in an area at a side of the connection supporting part 34 in the crystal reed 1 and forming excitation electrodes 30, 31 in an area of a -X side rather than the extraction electrodes 32, 33 in the crystal reed 1 to obtain the element for the crystal oscillator. COPYRIGHT: (C)2010,JPO&INPIT
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