A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
申请公布号
US2010000683(A1)
申请公布日期
2010.01.07
申请号
US20080216525
申请日期
2008.07.07
申请人
LAM RESEARCH CORPORATION
发明人
KADKHODAYAN BABAK;DHINDSA RAJINDER;DE LA LLERA ANTHONY;KELLOGG MICHAEL C.
