发明名称 |
CARBON NANOTUBE DEVICE AND PROCESS FOR MANUFACTURING SAME |
摘要 |
The present invention contemplates a variety of methods and techniques for fabricating an improved carbon nanotube (CNT) device such as an AFM probe. A CNT is first formed on a desired location such as a substrate. The CNT and substrate are then covered with a protective layer through a CVD or other suitable process. Then a length of the CNT is exposed through etching or other suitable process, the exposed length being formed to a length suitable for a desired application for the CNT device.
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申请公布号 |
US2010003500(A1) |
申请公布日期 |
2010.01.07 |
申请号 |
US20090548400 |
申请日期 |
2009.08.26 |
申请人 |
CARBON DESIGN INNOVATIONS, INC. |
发明人 |
STEVENS RAMSEY M. |
分类号 |
B32B5/16;B05D3/12;C23C14/34;C23C16/26;C23C16/513;C23C28/00 |
主分类号 |
B32B5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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