发明名称 |
BACKSIDE CONTROLLED MEMS CAPACITIVE SENSOR AND INTERFACE AND METHOD |
摘要 |
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity despite the parasitic capacitance that is created. The capacitive sensor element assembly, comprises a first semiconductive layer, and a first conductive layer, a first dielectric layer into which a cavity has been formed, the dielectric layer lying between the first semiconductive layer and the first conductive layer, wherein an electrical connection is made to the second conductive layer. A preferred method for fabricating a capacitive sensor assembly of the present invention comprises the steps of forming a dielectric layer on top of a conductive handle wafer; creating at least one cavity in the dielectric layer, bonding a thin semiconductive layer to the dielectric layer and connecting an operational amplifier to the input of the capacitive sensor assembly to overcome the parasitic capacitance formed during fabrication.
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申请公布号 |
WO2009139958(A3) |
申请公布日期 |
2010.01.07 |
申请号 |
WO2009US37942 |
申请日期 |
2009.03.23 |
申请人 |
CUSTOM SENSORS & TECHNOLOGIES, INC.;SEESINK, PETER;ABED, OMAR |
发明人 |
SEESINK, PETER;ABED, OMAR |
分类号 |
H01L23/58 |
主分类号 |
H01L23/58 |
代理机构 |
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代理人 |
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地址 |
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