RECOVERY OF HYDROPHOBICITY OF LOW-K AND ULTRA LOW-K ORGANOSILICATE FILMS USED AS INTER METAL DIELECTRICS,申请号KR20077007505-传众专利搜索

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发明名称	RECOVERY OF HYDROPHOBICITY OF LOW-K AND ULTRA LOW-K ORGANOSILICATE FILMS USED AS INTER METAL DIELECTRICS
摘要
申请公布号	KR100935620(B1)	申请公布日期	2010.01.07
申请号	KR20077007505	申请日期	2004.10.27
申请人		发明人
分类号	H01L21/31;H01L21/316	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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