| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer laser device capable of continuously oscillating by achieving an excitation state at uniform density in the longitudinal direction. SOLUTION: This excimer laser device 100 is provided with: a slab type carbon dioxide laser oscillator 10; a laser resonator filled with an excimer gas on an optical axis; and a cylindrical lens 11 linearly focusing laser light from the slab type carbon dioxide laser oscillator 10 to extend along the optical axis from a direction nearly orthogonal to the optical axis. The excimer gas runs in a direction nearly orthogonal to the optical axis and the laser light from the slab type carbon dioxide laser oscillator 10. COPYRIGHT: (C)2010,JPO&INPIT |
