摘要 |
PROBLEM TO BE SOLVED: To provide an energy ray-sensitive acid-generating agent which singly includes sufficient characteristics for the irradiation of rays in a wavelength range of 300 nm to 450 nm. SOLUTION: Provided is the energy ray-sensitive acid-generating agent represented by general formula (1) (wherein, R<SB>01</SB>to R<SB>06</SB>are each H, an alkyl group, a halogen or the like; R<SB>31</SB>is an alkyl group, an aryl group, or the like; R<SB>11</SB>and R<SB>12</SB>are each H, an alkyl group, or the like; R<SB>21</SB>and R<SB>22</SB>is each an aryl group or the like; X<SP>-</SP>is an optional anion). COPYRIGHT: (C)2010,JPO&INPIT |