| 摘要 |
PROBLEM TO BE SOLVED: To provide a glass substrate inverting apparatus that inverts glass substrates when they are transferred between the position where many glass substrates are stacked so that their processed sides, to be subjected to predetermined processing, face down and the position where the glass substrates are accommodated in a substrate accommodating tray so that their processed sides may face up. SOLUTION: The glass substrate inverting apparatus inverts the glass substrates when they are transferred between the position where many glass substrates are stacked so that their processed sides, to be subjected to predetermined processing, face downward and the position where the glass substrates are accommodated in the substrate accommodating tray so that the processed sides face upward. The apparatus includes a stage with a substrate floating face from which the glass substrates are floated, a tray fixing means for fixing a substrate accommodating tray on the substrate floating face side of the stage, and a stage inverting means for inverting the stage with the substrate accommodating tray fixed thereon. COPYRIGHT: (C)2010,JPO&INPIT |
