| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the detection precision of a flaw by reducing erroneous detection and to achieve the shortening of an inspection time and the reduction of cost at the same time. Ž<P>SOLUTION: An illumination optical system condenses light on a focal surface to irradiate an article 100 to be inspected and scans the light condensing point on the focal surface. A light splitting part 20 splits the light obtained from the article 100 to be inspected. A first light detecting part 21A includes a condensing lens 31A, a light restricting part 32A, and a photodetector 33A and detects one light after splitting. A second light detecting part 21B includes a condensing lens 31B, a light restricting part 32B and a photodetector 33B and detects the other light after splitting. The plane conjugated with the light restricting part 32A and the plane conjugated with the light restricting part 32B are shifted mutually in an optical axis direction in the vicinity of the focal surface. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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