发明名称 |
PHASE CHANGE BASED HEATING ELEMENT SYSTEM AND METHOD |
摘要 |
A method of and apparatus for regulating carbon dioxide using a pre-injection assembly coupled to a processing chamber operating at a supercritical state is disclosed. The method and apparatus utilize a source for providing supercritical carbon dioxide to the pre-injection assembly and a temperature control element for maintaining the pre-injection region at a supercritical temperature and pressure.
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申请公布号 |
US2010000681(A1) |
申请公布日期 |
2010.01.07 |
申请号 |
US20090511231 |
申请日期 |
2009.07.29 |
申请人 |
SUPERCRITICAL SYSTEMS, INC. |
发明人 |
BERTRAM RONALD T.;HILLMAN JOSEPH T;BIBERGER MAXIMILIAN A |
分类号 |
C23F1/08 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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