SEED LIGHT GENERATING DEVICE, LIGHT SOURCE DEVICE AND METHOD FOR ADJUSTING THE SAME, OPTICAL IRRADIATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To reduce leakage light when seed light is not generated, to adjust the spectral width of the output of a light source device, and to make settings so that an increase in spectral width of the output is reduced through the adjustment.

SOLUTION: The light source device 1 includes a seed light generating device 10, an optical amplification unit 20 which optically amplifies seed light L2 generated by the seed light generating device 10, and a wavelength conversion unit 30 which converts the wavelength of the light optically amplified by the optical amplification unit 20. The seed light generating device 10 includes a pulse emitting unit 11 which emits single-wavelength pulse light L1, a pulse modulating unit 12 which selectively passes and cuts out part of the pulse light L1, and a timing adjusting unit 15 which adjusts the cut-out timing of the pulse light L1 by the pulse modulating unit 12 relatively to the generation timing of the pulse light L1 by the pulse generation unit 11 according to an operation.

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