| 摘要 |
The invention provides a suction holding apparatus and a suction holding method that allow suction-holding a substrate reliably irrespective of substrate type, with a simple and inexpensive structure. The suction holding apparatus comprises a suction plate (2) having a suction surface (21); a lifting mechanism for changing the relative position of a glass substrate (P1) and the suction plate (2); a. temperature changing section (5) for changing the temperature of the suction surface (21); and a control device (100) for controlling the temperature changing section (5) so as to cause dew condensation on the suction surface (21) when the glass substrate (P1) is suctioned onto the suction surface (21). The suction surface (21) is cooled to a temperature at or below the dew point temperature, whereupon the glass substrate (P1) is suctioned by way of condensed water, and is bonded to a counter substrate (P2).
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