METHOD AND APPARATUS FOR REFINING Si AND APPARATUS FOR PRODUCING REFINED Si FILM

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for refining Si efficiently performing refining of low-purity Si to high-purity Si so as to produce solar cell-grade Si from metal-grade Si, and an apparatus for producing a refined Si film.

SOLUTION: The method for refining Si includes: a step of chemically reacting low-purity Si with atomic hydrogen to form a hydride gas cluster containing a hydride gas B2H6comprising boron (B) to be removed and a hydride gas SiH4comprising Si; and a step of obtaining high-purity Si having higher purity than the low-purity Si by bringing the hydride gas cluster into collision against a heated body surface whose temperature is controlled to a range from the decomposition temperature of the hydride gas B2H6comprising boron (B) to be removed to the decomposition temperature of the hydride gas SiH4comprising Si to remove the boron (B) to be removed from the hydride gas cluster by fixing on the heated body surface.

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