CAPACITOR AND METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a capacitor that miniaturizes a device equipped therewith by using a dielectric film with a high permittivity, to provide a capacitor manufacturing method that manufacture the capacitor at low cost, and to provide a semiconductor device with the capacitor. SOLUTION: A capacitor 1 has a structure which sandwiches a dielectric film 3 between a first electrode 2 and a second electrode 4. The dielectric film 3 contains Pb(ZrxTiyMz)O3as a main component, where M is at least one selected from Nb, Ta and V, and a formula x+y+z=1 is satisfied. COPYRIGHT: (C)2010,JPO&INPIT