| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for fixation and inspection of a substrate for achieving enhancement of inspection efficiency, as well as price-reduction and downsizing. Ž<P>SOLUTION: This device for fixation and inspection of substrate is equipped with a planar view nearly-rectangular mounting stand 11 and a fixation part for fixing the substrate 100 placed on the mounting stand 11. The above fixation part has a constitution provided with one air cylinder 21, four slide parts 22a-22d arranged one by one along the four edges on the mounting stand 11 so as to be movable respectively, arms 23a-23d respectively-installed in the slide parts 22a-22d so as to project towards edges on the facing mounting stand 11 for pressing each of ends 101a-101d on the substrate 100 placed on the mounting stand 11, and a movement mechanism for transmitting drive force of the air cylinder 21 to each of the slide parts 22a-22d and then moving them so that the arms 23a-23d may contact or separate from center C1 of the mounting stand 11 mutually with the same distance. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
