METHODS UTILIZING ORGANOSILICON COMPOUNDS FOR MANUFACTURING PRE-SEASONED COMPONENTS AND PLASMA REACTION APPARATUSES HAVING PRE-SEASONED COMPONENTS

摘要

Methods for pre-seasoning a component of a plasma reaction apparatus and method for fabricating plasma reaction apparatuses are provided. In an embodiment, a method for seasoning a component of a plasma reaction apparatus comprises providing an organosilicon compound, applying the organosilicon compound to the component, removing carbon atoms from the organosilicon compound, and forming a continuous, substantially uniform protective layer on the component, wherein the protective layer comprises silicon from the organosilicon compound.