MICRO POLYMERIZATION CATALYZED BY EXTERNAL ACID SOURCE FOR CHEMICAL LITHOGRAPHY

摘要

A method for preparing images in polymers comprising: preparing a template with an extruding desired pattern (501); contacting a surface of apolymer with a desiured pattern of the extruded surface of the template (503); treating the surface of the polymer with at least one of a liquid acid and vapor (505); treating the surface of the polymer with a high temperature for crosslinking (506); separating the template and polymer and revealing an acid imprint of the desired pattern on the surface of the polymer (507); baking the polymer to drive diffusion of the acid (509); and developing the polymer with at least one of a wet and dry process to produce a negative pattern in the polymer (511).