发明名称 |
MICROMACHINED COMB DRIVE FOR QUANTITATIVE NANOINDENTATION |
摘要 |
<p>A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.</p> |
申请公布号 |
WO2010003149(A1) |
申请公布日期 |
2010.01.07 |
申请号 |
WO2009US49697 |
申请日期 |
2009.07.06 |
申请人 |
HYSITRON INCORPORATED;OH, YUNJE;SYED ASIF, SYED, AMANULA;WARREN, ODEN |
发明人 |
OH, YUNJE;SYED ASIF, SYED, AMANULA;WARREN, ODEN |
分类号 |
G01N3/40;G01N3/00;G01N3/02;G01N3/06 |
主分类号 |
G01N3/40 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|