Improved Process Stability of NBDE Using Substituted Phenol Stabilizers

摘要

A stabilized cyclic alkene composition comprising one or more cyclic alkenes, and at least one stabilizer compound having the Formula (I),
€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ Formula (I)€ƒ€ƒ€ƒ€ƒ€ƒR 1 ,R 2 ,R 3 ,R 4 ,R 5 (C 6 )OH
wherein R 1 through R 5 can each independently be H, OH, C 1 -C 8 linear, branched, or cyclic alkyl, C 1 -C 8 linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl, and wherein the stabilizer compound is present in an amount greater than 200 ppm up to 20,000 ppm and has a boiling point lower than 265 °C. A method for forming a layer of carbon-doped silicon oxide on a substrate, which uses the stabilized alkene composition and a silicon containing compound.