| 发明名称 |
PLASMA-PROCESSING DEVICE AND METHOD OF MANUFACTURING ADHESION-PREVENTING MEMBER |
| 摘要 |
A plasma-processing device comprises a constituent member which performs plasma-processing of a noble metal material and a ferroelectric material on a substrate to be processed and is exposed to plasma while being heated. The constituent member is made of an aluminum alloy having an aluminum purity of 99% or higher.
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| 申请公布号 |
KR20100002267(A) |
申请公布日期 |
2010.01.06 |
| 申请号 |
KR20097022702 |
申请日期 |
2008.05.14 |
| 申请人 |
ULVAC, INC. |
发明人 |
KOKAZE YUTAKA;UEDA MASAHISA;ENDOU MITSUHIRO;SUU KOUKOU;MIYAZAKI TOSHIYA;SAKATA GENJI;NAKAMURA TOSHIYUKI |
| 分类号 |
H01L21/3065;H05H1/46 |
主分类号 |
H01L21/3065 |
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