| 发明名称 |
NOVEL METHODS FOR MAKING AND USING HALOSILYLGERMANES |
| 摘要 |
<p>The invention provides compounds of, and methods for the preparation of compounds of, the molecular formula, SixGeyHz—aXa; wherein X is halogen, and x, y, z, and a are defined herein, and methods for the deposition of high-Ge content Si films on silicon substrates using compounds of the invention.</p> |
| 申请公布号 |
EP2139680(A2) |
申请公布日期 |
2010.01.06 |
| 申请号 |
EP20080826083 |
申请日期 |
2008.04.02 |
| 申请人 |
ARIZONA BOARD OF REGENTS, ACTING FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY |
发明人 |
KOUVETAKIS, JOHN;TICE, JESSE;FANG, YAN-YAN |
| 分类号 |
B32B33/00;C01B33/08;C01B33/107;H01L21/02;H01L21/20 |
主分类号 |
B32B33/00 |
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