| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a gray tone mask of a half tone film type by which a high-quality TFT can be manufactured. Ž<P>SOLUTION: The method for manufacturing a gray tone mask having a pattern comprising a light shielding part, a light transmitting part and a light semitransmitting part is carried out in the following steps. A mask blank having a light semitransmitting film 22 and a light shielding film 23 successively formed on a transparent substrate 21 is prepared. A resist pattern 24a in a region corresponding to the light shielding part is formed on the mask blank, and the light shielding film 23 is etched by using the resist pattern 24a as a mask to form the light shielding part on the light semitransmitting film 22. Then a resist pattern 24b is formed in a region containing at least the light semitransmitting part, and the light semitransmitting film 22 is etched by using the resist pattern 24b as a mask to form the light semitransmitting part and the light transmitting part. Ž<P>COPYRIGHT: (C)2005,JPO&NCIPI Ž</p> |
