| 摘要 |
<p>PURPOSE: A cluster for treating a plurality of substrates is provided to improve productivity by processing a plurality of substrates in one process chamber. CONSTITUTION: In a device, a transfer chamber(114) limits a transfer space of a substrate under vacuum condition. A transfer chamber robot(124) transfers the substrate between a processing chamber(116) and a preheat chamber(120). The processing chamber is connected to the transfer chamber. The processing chamber process the substrate under the vacuum condition. A load lock chamber(112) is connected to the transfer chamber. A substrate transport apparatus(122) includes a plurality of first rollers and second rollers. A plurality of first rollers loads a plurality of substrates in a tray, and a plurality of second rollers transfers the tray to the load-lock chamber.</p> |
