PARTICLE-MEASURING SYSTEM AND PROCESSING APPARATUS,申请号KR20070118140-传众专利搜索

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发明名称	PARTICLE-MEASURING SYSTEM AND PROCESSING APPARATUS
摘要
申请公布号	KR100935258(B1)	申请公布日期	2010.01.06
申请号	KR20070118140	申请日期	2007.11.19
申请人		发明人
分类号	G01N15/06;G01N21/00;C23C14/00;C23C16/44;G01N1/24;H01L21/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/66	主分类号	G01N15/06
代理机构		代理人
主权项
地址

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