| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machine capable of realizing a very small diameter of a machined hole without degrading productivity or changing any hardware by providing a transfer mask with a phase shift function. <P>SOLUTION: A semi-transmissive mask 1 as a transfer mask is formed in a columnar shape of the length L, a mask aperture 2 is formed in a penetrating manner along the center axis, and a peripheral portion of the mask aperture 2 is a semi-transmissive part 3. The length L is determined so that the intensity of laser beams emitted from the semi-transmissive part 3 is equal to or less than the optical intensity of the machining threshold of a material to be machined, and the phase difference of odd number times the half wavelength of the laser beams 11 is ensured between the emitted beam (the passing beam 12) from the mask aperture 2 and the emitted beam (the passing beam 13) from the semi-transmissive part 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
