发明名称 SILT COATER
摘要 <p>PURPOSE: A slit coater is provided to precisely adjust horizontality of a priming roller installed at a pre-discharge apparatus, thereby facilitating the horizontal setting of a priming roller. CONSTITUTION: A slit coater comprises a worktable, a slit nozzle for applying a drug solution provided from the worktable, a moving part for transferring the slit nozzle or the substrate, a preliminary discharge device provided at one side of the worktable, and a horizontal control unit for controlling the horizontality of the preliminary discharge device. The preliminary discharge device comprises a case(61) that contains cleaning solution and includes a treatment part for drug solution; and a priming roller(67) which is arranged at the case and enables rotation thereof.</p>
申请公布号 KR20100001851(A) 申请公布日期 2010.01.06
申请号 KR20080061928 申请日期 2008.06.27
申请人 DMS CO., LTD. 发明人 LEE, SANG SU;OH, SANG TAEK
分类号 B05C5/02;G02F1/13;H01L21/027 主分类号 B05C5/02
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