APPARATUS FOR CONTACTING MASK AND EXPOSURING APPARATUS HAVING THE SAME

摘要

PURPOSE: An apparatus for contacting mask and exposing apparatus having the same are provided to adhere closely a mask to a mask completely by efficiently transferring a negative pressure to a gap between a mask and film. CONSTITUTION: In a device, a mask cover(50) includes a film(52) and a frame(51). The film is arranged on the mask(m). The Film is combined with the frame. A negative pressure generation unit forms a negative pressure in a gap between a film and a mask. The negative pressure generation unit is connected to an inlet(41) of a stage(40). The negative pressure transfer unit forms a passage to the space between the mask and the film from the inlet. The negative pressure transfer unit includes a material used for the passage, which is between the stage and film and is movable.