TESTING SYSTEM OF POWER CONTROL FOR SEMICONDUCTOR MANUFACTURING UNITS

摘要

PURPOSE: A power control testing system for a semiconductor manufacturing units is provided to improve the reliability of analyzed data by removing a compatibility problem between specific analyzing equipments. CONSTITUTION: A power supply unit(120) converts the external power(110) in order to suitable for standard voltage of the semiconductor manufacturing apparatus. A sensing signal feed port(130) changeably establishes a virtual output signal of the sensor which is in associated with the semiconductor manufacturing apparatus. A control signal analysis section(140) analyzes the input of the sensor for the process parameter control and an output signal. The regulator respectively extracts the constant voltage for the drive of a microprocessor. A D/A inverter(digital-to-analog inverter) changes outputted setting voltage into an analog signal.