PERIMETER SEAL FOR BACKSIDE COOLING OF SUBSTRATES,申请号EP20020752330-传众专利搜索

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发明名称	PERIMETER SEAL FOR BACKSIDE COOLING OF SUBSTRATES
摘要
申请公布号	EP1419357(B1)	申请公布日期	2010.01.06
申请号	EP20020752330	申请日期	2002.07.15
申请人	UNAXIS USA INC.	发明人	KENNEY, MARK, D.
分类号	F28F7/00;A61M5/00;B05C13/00;B24B5/00;B25J15/06;H01L21/00	主分类号	F28F7/00
代理机构		代理人
主权项
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