| 摘要 |
PURPOSE: A manufacturing method for three dimensional electroforming mask and an electroforming mask thereof are provided to improve reliability of the mask and simplify the process. CONSTITUTION: A manufacturing method for three dimensional electroforming mask comprises: a step of molding a metal mold which partially etches the warped surface of the light metal with 3D form as a FIDO field bosom to a specified pattern; a step of molding a silicon mold(20) which covers and cures the silicon resin on the warped surface of the etched light metal; a step of molding an epoxy mold(30) which covers and cures the epoxy mold inside the silicon mold; a step of molding a electro-plating layer which electrocast-plates using the epoxy mold; and a step of separating the electro-plating layer from the epoxy mold. |
