METHOD FOR IMPROVING INTER LAYER DIELECTRIC PLANARIZATION UNIFORMITY BY USING DUMMY POLY,申请号KR20020085989-传众专利搜索

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发明名称	METHOD FOR IMPROVING INTER LAYER DIELECTRIC PLANARIZATION UNIFORMITY BY USING DUMMY POLY
摘要
申请公布号	KR100935245(B1)	申请公布日期	2010.01.06
申请号	KR20020085989	申请日期	2002.12.28
申请人		发明人
分类号	H01L21/3105	主分类号	H01L21/3105
代理机构		代理人
主权项
地址

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