Magnetic sensor, production method thereof, rotation detection device, and position detection device

摘要

A one-chip type magnetic sensor is provided in which thin-film anisotropic magnetoresistance elements are formed on an IC substrate. Applied magnetic fields can be detected in the magnetic sensor in vertical and horizontal directions, and detection sensitivity can be adjusted with respect to direction. The influence on a magnetic-sensitive property can be suppressed when another magnetic field is applied from another direction. A semiconductor substrate, lead frame, and lead frame(s) are accommodated in a package in the magnetic sensor. Thin-film magnetoresistance elements are formed on the substrate, which includes an electric circuit having comparison and amplification functions. The lead frame is used to mount the semiconductor substrate thereon. The lead frames are connected to the semiconductor substrate, which is attached to a semiconductor attachment surface. The lead frame has a structure in which the semiconductor attachment surface is inclined with respect to a package surface by bending the lead frame.