发明名称 Method of making a bipolar junction transistor
摘要 Embodiments relate to a bipolar junction transistor and a method for manufacturing the same. An oxide pattern may be formed on a P type semiconductor substrate. A low-density N type collector area may be formed in the semiconductor substrate. First spacers may be formed at sidewalls of the oxide pattern, and a low-density P type base area may be formed in the semiconductor substrate. Second spacers may be formed on sidewalls of the first spacers. A high-density N type emitter area may be formed in the low-density P type base area between the second spacers, and a high-density N type collector area may be formed in the semiconductor substrate at an outside of the first spacers. The bipolar junction transistor may be realized through a self-aligned scheme using dual nitride spacers. A base width between the emitter area and the low-density collector area may be narrowed by the width of the second spacer.
申请公布号 US7642169(B2) 申请公布日期 2010.01.05
申请号 US20060615741 申请日期 2006.12.22
申请人 DONGBU HITEK, LTD. 发明人 KO KWANG YOUNG
分类号 H01L21/331 主分类号 H01L21/331
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