发明名称 Pulsation reducing apparatus and inspection apparatus
摘要 A pulsation reducing apparatus is used for an apparatus having a pump for circulating a liquid in a circulating line and a tank for storing the liquid circulating via the pump. The pulsation reducing apparatus includes a supplement tank for reserving the liquid such that a liquid surface height of the supplement tank is higher than that of the tank. The tank is connected to the supplement tank and the empty space portion of the tank is connected to the supplement tank via a gas exhaust line. When the empty space portion of the tank communicates with that of the supplement tank via the gas exhaust line due to a reduction of the liquid in the tank, the gas in the tank is exhausted to the empty space portion of the supplement tank via the gas exhaust line and the liquid in the supplement tank is supplemented into the tank.
申请公布号 US7641453(B2) 申请公布日期 2010.01.05
申请号 US20060488134 申请日期 2006.07.18
申请人 TOKYO ELECTRON LIMITED 发明人 HATTA MASATAKA
分类号 F04B11/00 主分类号 F04B11/00
代理机构 代理人
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