Polymer, top coating layer, top coating composition and immersion lithography process using the same,申请号US20060585082-传众专利搜索

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发明名称	Polymer, top coating layer, top coating composition and immersion lithography process using the same
摘要	A polymer, a top coating layer, a top coating composition and an immersion lithography process using the same are disclosed. The top coating layer polymer may include a deuterated carboxyl group having a desired acidity such that the top coating layer polymer may be insoluble with water and a photoresist, and soluble in a developer. The polymer may be included in a top coating layer and a top coating composition.
申请公布号	US7642042(B2)	申请公布日期	2010.01.05
申请号	US20060585082	申请日期	2006.10.24
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HATA MITSUHIRO;CHOI SANG-JUN;WOO SANG-GYUN;RYOO MAN-HYOUNG
分类号	G03F7/11;G03F7/30	主分类号	G03F7/11
代理机构		代理人
主权项
地址

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