发明名称 |
SYSTEMS AND METHODS FOR REDUCED STRESS ANCHORS |
摘要 |
Anchor systems and methods anchor components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.
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申请公布号 |
US2009321857(A1) |
申请公布日期 |
2009.12.31 |
申请号 |
US20080146014 |
申请日期 |
2008.06.25 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
FOSTER MICHAEL;WILLIAMS MARK;ESKRIDGE MARK |
分类号 |
H01L29/84;H01L21/00 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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