发明名称 INSULATOR MATERIAL OVER BURIED CONDUCTIVE LINE
摘要 One embodiment relates to an integrated circuit that includes a conductive line that is arranged in a groove in a semiconductor body. An insulating material is disposed over the conductive line. This insulating material includes a first insulating layer comprising a horizontal portion, and a second insulating layer that is disposed over the first insulating layer. Other methods, devices, and systems are also disclosed.
申请公布号 US2009321805(A1) 申请公布日期 2009.12.31
申请号 US20080165072 申请日期 2008.06.30
申请人 QIMONDA AG 发明人 VON KLUGE JOHANNES;SCHOLZ ARND;RADECKER JOERG;PATZ MATTHIAS;KUDELKA STEPHAN;AVELLAN ALEJANDRO
分类号 H01L27/108;H01L21/28;H01L21/4763;H01L29/78 主分类号 H01L27/108
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