发明名称 SEMICONDUCTOR DEVICE HAVING RECESS GATE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device having a recess gate includes a semiconductor substrate having a recess, a conductive pattern for a gate electrode filled into the recess, and having an extension portion protruding higher than a surface of the semiconductor substrate, an epitaxial semiconductor layer having a top surface disposed over the semiconductor substrate, and a gate insulating layer disposed between the epitaxial semiconductor layer and the conductive pattern, and between the semiconductor substrate and the conductive pattern. Further, a method of fabricating the same is disclosed.
申请公布号 US2009321821(A1) 申请公布日期 2009.12.31
申请号 US20090553581 申请日期 2009.09.03
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JUNG YOUNG-KYUN
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
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