发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
摘要 A semiconductor device is provided. An insulating buried layer is formed in a substrate. Deep trench insulating structures are formed on the insulating buried layer. A deep trench contact structure is formed between the deep trench insulating structures. The deep trench contact structure is electrically connected with the substrate under the insulating buried layer.
申请公布号 US2009321875(A1) 申请公布日期 2009.12.31
申请号 US20080266509 申请日期 2008.11.06
申请人 VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION 发明人 CHANG JUI-CHUN
分类号 H01L21/762;H01L29/06 主分类号 H01L21/762
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